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Hitachi Hhigh-Technologies Corporation
Electronic Materials Dept.
Electronic Materials Div.
24-14, Nishi-Shimbashi 1-chome, Minato-ku,
Tokyo 105-8717, JAPAN
TEL.+81-3-3504-6157
FAX.+81-3-3504-5198/7830
E-Mail:teg@nst.hitachi-hitec.com

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