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Dry Etch System
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20, Apr, 2011
PDF Hitachi High-Technologies Corporation Receives Intel's Prestigious Supplier Continuous Quality Improvement Award.(PDF 77KB)

22, Feb, 2010
Etch process development for double patterning with self-freezing ArF resist and spin on hard mask.

03, Dec, 2009
Advanced etch technology presented at the SEMI Technology Symposium.
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