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The Scanning Electron Microscope (SEM) has played an important role for many years for research and development of advanced materials in the leading edge of many technologies.
Hitachi High-Technologies Corporation has developed the SU6600 Schottky Field Emission Analytical SEM to meet the increased demand for analytical, high resolution microscopy. It utilizes advanced Variable Pressure (VP) technology and an improved Schottky field emission electron source that provides exceptional imaging and high probe current with great stability. |
It allows accommodation of EDX, WDX and EBSP(*) systems for versatile material analyses in addition to high resolution imaging and materials characterization. The VP mode allows the operator to change vacuum conditions in the sample chamber from high vacuum (≤10-4Pa) to low vacuum (10-300Pa) operation with a single click of the mouse. The SU6600 provides unparalleled imaging and EDX and EBSP analysis of challenging samples without the need for sample preparations such as metal coating or special grounding techniques.
The SU6600 is a new and versatile Field Emission SEM for a diversified range of applications including observations and analyses of advanced materials which have become increasingly important for modern science and engineering. |
(*)EDX : Energy Dispersive X-ray Spectrometer
WDX : Wavelength Dispersive X-ray Spectrometer
EBSP : Electron Back-Scatter Patterns
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Features |
- Maximum probe current of 200nA for analytical applications including EDX, WDX and EBSP. Increased analytical sensitivity and throughput
- Advanced Variable Pressure mode allows observation and analysis of non-conductive samples. The high vacuum mode and the VP mode are selectable at a click of the mouse on the operation panel. An unique automated differential aperture system (ADAPT) selects and inserts the optimum aperture size for each vacuum mode and application.
- An improved signal detection system includes a highly efficient Everhart-Thornly Secondary Electron Detector (SED) for high resolution imaging and a new low impedance solid state Backscattered Electron Detector (BSED) with clear, sharp TV rate observation. An optional Environmental Secondary Electron Detector (ESED-II) permits collection of secondary electron in the VP mode providing surface observation even at long sample working distances.
- A large analytical specimen chamber with a standard specimen exchange airlock system is standard on the SU6600. Simultaneous accommodation of EDX, WDX and EBSP optimizes workflow and user convenience without sacrificing performance. The sample exchange system allows a maximum of 150mm diameter × 40mm thick sample with a pumpdown time of approximately 30 seconds and vent time of 13 seconds.
- A large, 5-axis, computer eucentric, motor-drive stage is a standard feature on the SU6600
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Specifications |
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| Secondary electron image resolution |
1.2nm (Vacc: 30kV, WD = 5mm, Mag: 180kX)
3.0nm (Vacc: 1kV, WD = 4mm, Mag: 80kX)
3.0nm(*1) (Vacc: 30kV, WD = 5mm, Mag: 80kX, 60Pa)
Note: Magnification based on industry standard 4×5 Polaroid film, not viewing monitor
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| Backscattered electron image resolution |
| 3.0nm (Vacc: 30kV, WD = 5mm, Mag: 80kX, 10Pa) |
| Magnification |
| 10 - 600,000X (at displayed image size is 127 × 96mm) |
| Electron optics |
| Electron gun |
ZrO/W Schottky emission electron source |
| Probe current |
1pA - 200nA |
| Accelerating Voltage |
0.5 - 30kV (0.1kV step) |
| Lens system |
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| Objective lens aperture |
Movable aperture (heating type. 4 openings selectable from outside of vacuum with fine adjustment mechanism, 200-100-50-30µm) |
| Stigmator coil |
Octopole electromagnetic system (X, Y) |
| Scanning coil |
2-stage electromagnetic deflection |
| Beam blanking |
Electromagnetic type (for image freezing) |
| Specimen stage |
| Stage control |
5-axis computer eucentric motor drive |
| Movable range |
X: |
0 - 110mm |
| Y: |
0 - 110mm |
| Z: |
4 - 40mm |
| T: |
-5° - +70° |
| R: |
360° |
| Sample size (maximum) |
150mm diameter × 40mmH |
| Electrical image shift |
| ±50µm (WD= 15 mm) |
| Detectors |
Secondary electron detector
Backscattered electron detector |
| Personal computer |
Windows® Desktop PC
OS: Windows®XP Professional(*2) |
| Monitor |
| 19 type LCD (larger monitors available at option) |
| Image display mode |
| Full screen display |
1,280 × 960 pixels |
| Reduced area display |
640 × 480 pixels |
| Reduced area display |
320 × 240 pixels |
| Dual image display |
640 × 480 pixels × 2 |
| Scanning speed |
| TV scan |
(640 × 480 pixel display: 25/30(*3) frame/s) |
| Fast scan |
(full screen display: 6.25/7.5(*3) frame/s) |
| Slow scan |
(full screen display: 1/4/20/40/80s/frame
640 × 480 pixel display: 0.5/2/10/20/40s/frame) |
| Image data saving |
| 640 × 480 pixels, 1,280 × 960 pixels, 2,560 × 1,920 pixels, 5,120 × 3,840 pixels |
| Image data printing |
| Free layout print function provided |
| Saved image data management |
| SEM data manager (image database / image processing function included) |
| External device connection port |
USB interface (2ports)
Network interface (Ethernet(*4)) |
| Evacuation system |
| Auto evacuation |
Fully automatic pneumatic valve control system |
| Ultimate vacuum |
Electron gun chamber: <1 × 10-7Pa
Specimen chamber: <7 × 10-4Pa |
| Vacuum pumps |
Ion pump 40L/s × 2
Turbo molecular pump 260L/s × 1
Oil rotary pump 135/162(*3) L/min × 2 |
| Vacuum gauges |
Penning gage × 1
Pirani gage × 4 |
| N2 purge |
Port for N2 purge (1/4 taper nut)
(Supply pressure: 10 - 20kPa) |
| Protection functions |
| Protection against power and vacuum failures |
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(*1):ESED-II: Option
(*2):Windows® is a registered trademark of Microsoft Corp., in the U.S. and other countriis.
(*3):50/60Hz
(*4):Ethernet is a trademark of Xerox Corp., USA
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