FIB (Focused lon Beam System) : Hitachi High-Technologies Corporation

Focused Ion Beam System FB2200

The Next Generation for Higher Throughput, Precision & Quality.
Offering High-speed TEM Sample Preparation with Large area lon Beam Milling.

Over 60nAmps of ion beam current to enhance sample throughput
Low-damage specimen preparation with low accelerating voltage in-situ
Pinpoint precision sample preparation of thin films utilizing Hitachi's patented Micro-sampling^(*)
Compatible Holders^(*) for Hitachi SEM, TEM and STEM for rapid and simple sample transfer for further imaging and analysis

^(*):Option

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Focused Ion & Electron Beam System nanoDUE'T NB5000

Hitachi's high performance FIB-SEM provides unparalleled nano-analyses of devices and functional materials !!

Legendary Hitachi reliability and performance in an integrated system (Ultra-high performance FIB and high resolution FE-SEM) enabling high-throughput specimen preparation, high resolution imaging and analysis and precision nanofabrication. New low-damage fabrication techniques have been developed for materials sensitive to electron irradiation. Innovations in sample loading, sample navigation, and Micro-sampling increase analysis efficiency^(*).

^(*):Optional accessory

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Micro-sampling system

This device is used for cutting out the desired wafer part for analysis with STEM, TEM, etc. by ion beam in the vacuum chamber of FIB system and taking it out with a manipulator. Positional accuracy in sample preparation can be enhanced and preparation time can be shortened to about half an hour. (Already patented in Japan and U.S.A.)

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3D analysis holder

This is a sample rotation holder commonly usable for FIB and STEM in order to observe a micro-sample processed in the shape of a pillar with an FIB system. It is effectively usable for 3-dimensional structural evaluation of electronic devices under miniaturization and for stereoscopic failure analysis.

CAD Navigation System
NASFA(Navigation System for Failure Analysis)

It can be checked to which wiring of CAD data an LSI pattern under observation with an FIB system corresponds. When coordinates in CAD data are specified, the sample stage of the system moves to the coordinates through interlink and a SIM image at the corresponding location is displayed. Also, CAD data and SIM image can be overlaid (overlay display). Therefore, condition of the lower-layer wiring can be easily checked and a substantial increase in the efficiency of analysis and repair work can be expected.

FIB (Focused lon Beam System)

Focused Ion Beam System FB2200

Focused Ion & Electron Beam System nanoDUE'T NB5000

Micro-sampling system

3D analysis holder

CAD Navigation SystemNASFA(Navigation System for Failure Analysis)

CAD Navigation System
NASFA(Navigation System for Failure Analysis)