Nano-Probing System

Hitachi Nanoprober Dedicated nano-probing system N-6000

Measure a single MOS transistor characteristics, by directly touching down probes on cotact plug of LSI device.  more detail

Hitachi Nanoprober EBAC system  N-6000 + nanoEBAC (EBAC/EBIC imaging function)

A nano-probing / fault localization imaging tool to visualize underlying interconnect failure position in LSI device by EBAC (Electron Beam Absorbed Current) /EBIC (Electron Beam Induced Current) imaging.  more detail

Hitachi Electron Beam Absorbed Current(EBAC) Characterization System nanoEBAC NE4000

The Hitachi NE4000 nanoEBAC is an electron beam based probing system for electrical characterization and EBAC analysis and imaging of microelectronic device interconnects, materials, and components.