Nano Mechanical Probing System

Model N-6000 is a SEM-based nano probing instrument for 90-65-45nm device generations. With high precision pieze-driven actuators equipped, N-6000 directly touches its fine probes on actual circuit of device, and make it possible to measure electrical characteristics of deep-submicron electrical structures, like single MOS transistor, interconnect and so on.

N-6000 product concept is to realize operation environment of optical mechanical prober: intuitive operation in atmosphere, in SEM vacuum environment.
In fact, N-6000 operation is as intuitive as optical mechanical prober, and makes you less feel inconvenience of using vacuum in spite of vacuum environment.