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MICRO-RAILROAD

MICRO-RAILROAD

Takeo Suzuki, Masaru Sukegawa, Tsuyoshi Mizuno, Mitsuhiko Yamada (Hitachi Instrument Engineering Co.,Ltd.)

Tadashi Otaka, Teruyuki Kagami (Instrument Division, Hitachi, Ltd.)

Yoshinori Nakayama (Central Research Laboratory, Hitachi, Ltd.)

It is well known that orbit width of Sinkansen is managed strictly for safety transportation. This MICRO-RAILROAD is made of the laser interference exposure and the anisotropic etching technology using (110) silicon plate, which realizes high precision that has 0.24 ± 0.001 pitch width. It is expected to use as standard of minute metrology indispensable for the field of advanced technology.
At 51st photo contest hosted by the Japanese Society of Electron Microscopy in 1995.

All information related to these photographers is based on the information when the photo was taken.
This work was presented at the "photo contest" hosted by the Japanese Society of Microscopy.
Reproduction or republication without permission prohibited.
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