Peripheral : Hitachi High-Technologies Corporation

Ion Milling System IM4000

Hybrid Instrument With Cross-section milling and Flatmilling!

Hybrid model: Two milling configurations available
Cross-section milling: smooth polishing of cross-section specimens for high resolution imaging of subsurface structures.
Flatmilling: uniform polishing of surfaces as large as 5mm with variable angle milling to selectively enhance specimen surface features.
Higher Throughput: Improved milling efficiency
Reduced cross-sectioning times with new ion gun design compared to previous E-3500 model.
(Max.Milling rate: 300μm/hr for Si - 66% reduction in processing time)
Removable sample stage unit: Removable sample stage unit for convenient specimen setting and cutting edge definition.

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Mild Sputter E-1045

Capable of minimizing the sample damage and coating a sample with ultra flat particles due to adaptation of magnetron electrodes. Applicable to high resolution SEMs.

Maximum sample diameter : 60 mm
Maximum sample height : 20 mm

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High Accuracy Coolant Circulation Unit W-5020Td

In response to pergormance upgrading of FE-SEM, accurately temperature controlled water is supplied for cooling the electron lenses. Because water is circulated, its consumption is minimum, so running cost can be reduced. This unit can be started and stopped in synchronization with SEM. Thus, the operator is relieved from coolant operation.

Power requirements : Single phase, 100 V AC, 2.0 kVa
Dimensions/weight : 400 W × 450 D × 665 H mm, approx. 73kg

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High Accuracy Coolant Circulation Unit W-5030

This unit supplies accurately temperature controlled water to the SEM, FIB, etc. Because water is circulated, its consumption is minimum, so running cost can be reduced. This unit is suited mainly for cooling an oil diffusion pump (DP). W-5030 can be started and stopped in synchronization with SEM.
Thus, the operator will be relieved from coolant operation. After cooling, this unit can be automatically stopped.

Power requirements: Single phase, 100 V AC, 1.5 kVA
Dimensions/weight: 400 W x 450 D x 665 H mm, approx. 70kg

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Peripheral Device

Ion Milling System IM4000

Mild Sputter E-1045

High Accuracy Coolant Circulation Unit W-5020Td

High Accuracy Coolant Circulation Unit W-5030