Peripheral : Hitachi High-Technologies Corporation

Ion Milling System E-3500

Mirror finished Cross-Section of various samples can be obtained.

The ion beam which is parallel to the shielding plate ensure smooth Cross-Sectioning.
Small flaws and distortions caused by mechanical cutting and polishing can be reduced or removed.
Detachable specimen stage for ease of specimen setting.

Flat milling system IM-3000

Effective for removal of sample surface layer and the final finish after mechanical polish.

Uniform Processing of 5 mm.
Maximum specimen size of 50 mm × 25 mmH.
Variable beam irradiation angle from 0 to 90 degree.

Mild Sputter E-1045

Capable of minimizing the sample damage and coating a sample with ultra flat particles due to adaptation of magnetron electrodes. Applicable to high resolution SEMs.

Maximum sample diameter : 60 mm
Maximum sample height : 20 mm

Ion Sputter E-1010

Sample heating and damage are minimized using ring electrodes, floating sample stage, etc. A carbon coating accessory (option) is also prepared.

Maximum sample diameter : 50 mm

High Accuracy Coolant Circulation Unit W-5020Td

In response to pergormance upgrading of FE-SEM, accurately temperature controlled water is supplied for cooling the electron lenses. Because water is circulated, its consumption is minimum, so running cost can be reduced. This unit can be started and stopped in synchronization with SEM. Thus, the operator is relieved from coolant operation.

Power requirements : Single phase, 100 V AC, 2.0 kVa
Dimensions/weight : 400 W x 450 D x 665 H mm, approx. 73kg

High Accuracy Coolant Circulation Unit W-5030

This unit supplies accurately temperature controlled water to the SEM, FIB, etc. Because water is circulated, its consumption is minimum, so running cost can be reduced. This unit is suited mainly for cooling an oil diffusion pump (DP). W-5030 can be started and stopped in synchronization with SEM.
Thus, the operator will be relieved from coolant operation. After cooling, this unit can be automatically stopped.