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Ion Milling System E-3500 |
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Mirror finished Cross-Section of various samples can be obtained.
- The ion beam which is parallel to the shielding plate ensure smooth Cross-Sectioning.
- Small flaws and distortions caused by mechanical cutting and polishing can be reduced or removed.
- Detachable specimen stage for ease of specimen setting.
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Flat milling system IM-3000 |
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Mild Sputter E-1045 |
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Capable of minimizing the sample damage and coating a
sample with ultra flat particles due to adaptation of magnetron electrodes. Applicable
to high resolution SEMs.
- Maximum sample diameter : 60 mm
- Maximum sample height : 20 mm
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Ion Sputter E-1010 |
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Sample heating and damage are minimized using ring electrodes,
floating sample stage, etc. A carbon coating accessory (option) is also prepared.
- Maximum sample diameter : 50 mm
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High Accuracy Coolant Circulation Unit W-5020Td |
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In response to pergormance upgrading of FE-SEM, accurately
temperature controlled water is supplied for cooling the electron lenses. Because water is circulated, its consumption is minimum, so running cost can be reduced. This unit can be started and stopped in synchronization with SEM. Thus, the operator is relieved from coolant operation.
- Power requirements : Single phase, 100 V AC, 2.0 kVa
- Dimensions/weight : 400 W x 450 D x 665 H mm, approx. 73kg
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High Accuracy Coolant Circulation Unit W-5030 |
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This unit supplies accurately temperature controlled water
to the SEM, FIB, etc. Because water is circulated, its consumption is minimum,
so running cost can be reduced. This unit is suited mainly for cooling an oil
diffusion pump (DP). W-5030 can be started and stopped in synchronization with
SEM.
Thus, the operator will be relieved from coolant operation. After cooling, this
unit can be automatically stopped.
- Power requirements: Single phase, 100 V AC, 1.5 kVA
- Dimensions/weight: 400 W x 450 D x 665 H mm, approx. 70kg
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