High Accuracy Coolant Circulation Unit W-5020Td : Hitachi High-Technologies Corporation

	In response to pergormance upgrading of FE-SEM, accurately temperature controlled water is supplied for cooling the electron lenses. Because water is circulated, its consumption is minimum, so running cost can be reduced. This unit can be started and stopped in synchronisation with SEM. Thus, the operator is relieved from coolant operation.

Features

The W-5020Td operates in linkage with the SEM from starting to closing. When the SEM is closed, the W-5020Td closes its operation automatically after cooling the DP.
It requires no plumbing for water supply and drain.
It saves on water consumption as it operates with water in the builtin container. No extra water supply is required.
When freezing of water is anticipated, anti-freeze can be used for the cooling water.
When there is an unexpected water leak from tubing of the W-5020Td and SEM (or AA), maximum volume of water is in the container. There is no continuous flow of water from the pipeline.
A new coolant of HFC-134a has been used for environmental protection purposes.
Consumption of the electricity been reduced by approximately 23%. (comparison with our original type of W-5030Tq)
The usage volume of Coolant been reduced by approximately 23%. (comparison with our original type of W-5030Tq)

Item	Specifications
Usable environment	Room temperature: 5 - 30°C, RH: 70% or less
Cooling water temperature	20°C
Water pressure	95/127 kPa (lift: 9.5/12.7 m) (50/60 Hz)
Water flow	27/31 liters/min. (maximum) A flow regulator valve is built in.
Water container	About 16 liters (A level meter is buill in.)
Cooling capacity	0.40/0.45kW (770/880 kCal/h) (Cooling water 20°C, Room 30°C, ±5%) 50/60Hz
Coolant	HFC-134a (about 300 g)
Heat generation	1.5 kW (1,300 kCal/h)
Power	Single phase AC 100 V (±10%), 2.0kVA (50/60 Hz)
Weight	73 kg including cooling water in container
Dimensions	40 (w) × 45 (d) × 67 (h) cm
Remote operation signal input	DC 24 V
Others	Casters are built in.