SEM (Scanning Electron Microscope)

• Large sample up to 300mm in diameter
• Observable area up to 203mm in diameter
• Observation and EDS analysis on a sample up to 110mm tall
• Versatile port layout for various analytical applications

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• Even better resolution SE 7nm at 3kV, BSE 10nm at 5kV
• New Gun Bias System and Image Signal Processing allows quick and easy focus adjustment and astigmatism correction
• High speed Automatic Focus Control (AFC) and Auto Brightness & Contrast Control (ABCC) function enable faster and optimized image observation

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• Revolutionary automatic axis-alignment functions
  (Auto Beam Setting, Auto Axial Alignment, etc.)
• Even better resolution of 10nm at 3kV
• Saving floor space and electric power consumption due to TMP evacuation system.

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• 20 % Reduction in Footprint Compared to the Current Model
• VP Mode Standard
• SE 3.0 nm Resolution at 30 kV, BSE 4.0 nm (6 Pa) Guaranteed
• Accommodates Samples up to 153 mm (diameter) and 60 mm (height)
• Saving floor space and electric power consumption due to TMP evacuation system.

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