Scanning Electron Microscope SU1510 : Hitachi High-Technologies Corporation

The SU1510 is a medium size chamber Variable Pressure SEM with the same performance and features as the S-3400N and S-3700N models. Quad Bias gun electronics greatly improves low voltage performance and increases beam current well suited for today's SDD X-ray detectors. Dual high-take-off ports accommodate two EDS detectors mounted 180 degrees apart for tice the analytical data collection plus eliminates X-ray map shadows associated with rough sample surfaces. A high speed, clean, efficient TMP eliminates the need for water cooling.
Compact, high performance and easy to use makes the SU1510 a great general purpose VPSEM for any advanced laboratory.

Features

Turbo Molecular Pump (TMP) is standard. As an oil-free pumping system, sample contamination is minimised. Unlike conventional oil diffusion pumped SEM, it does not require large heating capacity or water re-circulator, making it an energy saving ecological SEM.
To assist inexperienced users the SU1510 includes an on-screen operation guide that walks the user step by step through the complete imaging process - from vacuum mode selection to image capture. This unique feature allows users of all experience levels to quickly obtain high quality images.
The advanced technologies incorporated into the SU1510 provide a guaranteed secondary electron resolution of 3.0nm (high vacuum mode) and a guaranteed backscattered electron resolution of 4.0nm (variable pressure mode).
For quick observation of non-conductive samples the SU1510 utilizes variable pressure mode that eliminates negative charging, and provides the optimum conditions for both imaging and EDX microanalysis^(*1).
The specimen chamber and stage have been designed to accommodate samples as large as 153mm in diameter. Simultaneous EDX microanalysis and imaging can be completed on a sample that is up to 60mm in height at the analytical working distance of 15mm.
The ESED-II^(*2) is optionally available if secondary electron imaging in variable pressure mode is desired. This detector is integrated into the GUI of the SU1510 and is completely software driven with all automatic features ready for instant use by the operator.

^(*1):Energy Dispersive X-ray microanalysis (option)
^(*2):Environmental Secondary Electron Detector (option)
^(*):Table is to be prepared locally.
^(*):The images are simulated, and are not actual images.

Specifications

Items		Description
Resolution SE		3.0nm at 30kV (High Vacuum Mode)
Resolution BSE		4.0nm at 30kV (Variable Pressure Mode)
Magnification		×5 to ×300,000
Accelerating Voltage		0.3 to 30kV
Low vacuum Range		6 to 270Pa through graphic menu
Image Shift		±50µm (WD=15mm)
Maximum Specimen Size		153mm in diameter
Specimen Stage	X	0 to 80mm
	Y	0 to 40mm
	Z	5 to 50mm
	R	360°
	T	-20° to 90°
	Observable area	126mm in diameter (with rotation)
	Maximum Height	60mm (WD=15mm)
Electron Optics	Electron Gun	Precentered Cartridge Filament
	Objective Aperture	5-position, click stop objective aperture
	Gun Bias	Quad bias with variable bias control
	Detectors	Secondary Electron Detector
	Detectors	High Sensitivity Semiconductor BSE Detector
	Analytical Position	WD = 15mm, TOA = 35°
Display	OS	Windows^® XP (subject to change without notice)
	Controls	Mouse, Keyboard
	Monitor	19 type LCD (subject to change without notice)
	Auto Alignment	Auto Beam Setting, Auto Axial Alignment
	Auto Image Adjustment	Auto Focus, Auto Stigmator/Focus
	Auto Image Adjustment	Auto Brightness & Contrast
	Image Data Saving	640 × 480 pixels, 1,280 × 960 pixels
	Image Data Saving	2,560 × 1,920 pixels, 5,120 × 3,840 pixels
	Image Filing	Search Functions / Built-in Image Data Base with Image Processing Functions
	Filing Format	BMP,TIFF,JPEG
	Auto Data Display	Accelerating Voltage, Magnification, Micron Marker, Unit, Working Distance,Date/Time, Detector, Pressure
	Image Display Mode	Full Screen Display : 1,280 × 960 pixels
		Small Screen Display : 640 × 480 pixels
		Dual Image Display : 640 × 480 pixels ×2
		Signal Mixing
Evacuation System	Operation	Full Automatic Sequence
	Turbo molecular pump	210L/s × 1
	Oil Rotary Pump	135L/min (162L/min. with 60Hz) × 1
	Protection	Power Failure and Vacuum Failure
Auxiliary Functions		Raster Rotation
		Dynamic Focus/Tilt Compensation
		Dynamic Stigma Monitor
		Free Layout Print Function
		3D Animation Maintenance Guide
		Operation Guide
		Easy Measurement
		Oblique image

· Windows® is a registered trademark of Microsoft Corp., in the U.S. and other countries.
· Observable area is restricted by specimen size.