 |
This software acquires three dimensional information on a sample by using BSE signal, displays bird's-eye view and three dimension display, and enables the height measurement of the sample.
|
| |
|
|
|
Features |
| |
- Three-dimensional image can be rotated or zoomed in by mouse control.
- Three-dimensional image is available without tilting a sample or worrying about image shift since
the 3D-VIEW utilizes the signal detected by Quad BSE detector which has 4 elements in 4 directions.
- Distance in height between 2 points and simple surface
roughness can be measured from sectional profile.
- Three-dimensional image screen can be recorded in animation file (AVI format).
|
|
|
Specifications |
|
Items |
Description |
| Import function |
Automatic select and read function of four elements image data
(Equipped with automatic SEM condition acquisition function) |
| Measurement performance |
Depth accuracy ± 20% (Reference)
Measurement performance is different depending on calibration accuracy, the condition of the kind of the specimen, the observation mode, and the observation condition.
Detectable angle range: ±50 (Reference)
(Observation condition: Standard mode)
Unavailable in the combination of "Charge-up reduction mode" and "5kV mode". |
| Measurement function |
Section profile display
Calibration function (X/Y, Z and Flat)
Distance of X and Y, length and angle measurement between two points specified on the image
Surface area measurement
Distance of X and Y, length and angle measurement between two points specified on section profile
Surface roughness measurement on section profile
Depth direction zoom-in function in section profile display
Base line correction function (straight line and curved line)
Bird's-eye view display
Color contour line display |
| Three-dimensional display function |
Rotation and zoom-in Animation record function of observation screen (AVI file) |
| PC OS |
Windows® VISTA Home Premium (SP1) (32-bit)
Windows® 7 Professional (32-bit) |
*A steep topographical surface that exceed detectable angle might not be displayed accurately.
*Windows® is a registered trademark of Microsoft Corporation in the United States and/or other countries.
|
|
|
|
News & Events 
Products & Services | Customer Service |
