Provides higher-resolution images through optimization of the electron optics system
With the newly developed tabletop microscope TM3030, Hitachi High-Tech has improved the resolution of observed images in order to meet the needs of customers seeking to perform high-resolution observations without sample preparation. By optimizing the electron optics system, Hitachi High-Tech has provided a “5kV mode” that enables sharper observations of the finest structures of sample surfaces, which cannot be observed at high accelerating voltages. Observations under high magnification also provide sharper, higher resolution observation images.
This software acquires three dimensional information on a sample by using BSE signal, displays bird's-eye view and three dimension display, and enables the height measurement of the sample.