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The dedicated scanning transmission microscope (STEM) HD-2700, equipped with spherical aberration corrector co-developed by CEOS GmbH (Germany, managing director: Dr. Max Haider), enables dramatically expanded STEM performance suitable for advanced nano-technology research. Due to the correction of spherical aberration which has limited the performance of electron microscope, approximately 1.5 times higher resolution and 10 times higher probe current than the standard model are achieved simultaneously.
Recently, High-resolution lens and Cold-field emission gun are available to further pursue image resolution and beam energy resolution respectively. Also, a version of main unit without Cs-corrector is also added to model line-up and leaves possibility of Cs-corrector upgrade in future. |
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Features |
High resolution STEM imaging
- HAADF-STEM image 0.136nm, FFT image 0.105nm (HR lens(*))
- HAADF-STEM image 0.144nm (Std. lens)
- BF STEM image 0.204nm (w/o Cs-corrector)
High-speed & high-sensitivity EDX analysis: Probe current x 10 times
- Elemental mapping in more rapid timely manner
- Low-concentration element detection
Simplified operation
- Automatic image alignment function
Seamless solution from sample preparation to observation & analysis.
- Holder compatibility with Hitachi FIB
Versatile evaluation & analysis function with various options
- Simultaneous acquisition & display of SE&BF, SE&DF, BF&DF, DF/EDX mapping(*) and DF/EELS mapping(*) images.
- Low Dose function(*) (minimizing electron beam damage & contamination of specimen)
- High precision magnification calibration & measurement(*)
- Live diffraction unit(*) (Simultaneous observation of DF-STEM image and Diffraction pattern)
- Automatic tilt-series image acquisition function using 3D micro-pillar rotation holder (360°rotation)(*)
- ELV-3000 Real-time Elemental mapping system(*) (simultaneously acquired with DF-STEM image)
(*) Option
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Specifications |
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Spherical Aberration Corrected Scanning Transmission Electron Microscope HD-2700
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Description |
| Image resolution |
w/o Cs-corrector |
0.204 nm guaranteed (at a magnification of ×4,000,000) |
| w/ Cs-corrector |
0.144 nm guaranteed (at a magnification of ×7,000,000)(Std. lens) |
0.136 nm guaranteed (HAADF image)
0.105 nm guaranteed (by FFT)(at a magnification of ×7,000,000)(HR lens(*)) |
| Magnification |
×100 - ×10,000,000 |
| Accelerating voltage |
200 kV, 120 kV (*) |
| Imaging signal |
Bright field STEM: Phase contrast image (TE image)
Dark field STEM: Z-contrast image (ZC image)
Secondary electron image (SE image)
Electron diffraction(*)
Characteristic X-ray analysis and mapping(EDX)(*)
EELS analysis and mapping(EV3000)(*) |
| Electron optics |
Electron source |
Schottky emitter |
| Cold field emitter(*) |
| Illumination lens system |
2-stage condenser lens |
| Cs-corrector(*) |
Hexapole transfer lens design |
| Scanning coil |
2-stage electromagnetic coil |
| ZC collection angle control |
Projector lens design |
| Electromagnetic image shift |
±1 μm |
| Specimen stage |
Specimen movement |
X/Y = ±1 mm, Z= ±0.4 mm |
| Specimen tilt |
Single-tilt holder: ±30° (Std. lens), ±18° (HR lens(*)) |
| Vacuum system |
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Ion pump ×3, TMP ×1 |
| Ultimate vacuum |
10-8 Pa (Electron gun), 10-5 Pa (Specimen chamber) |
| Image display |
PC/OS |
PC/AT compatible, Windows® xp |
| Monitor |
19-inch LCD panel |
| Image frame size |
640 × 480, 1,280 × 960, 2,560 × 1,920 pixels |
| Scan speed |
TV, Slow (0.5 – 320 s/frame) |
| Auto data display |
Recording No., accelerating voltage, micron bar Magnification, date, time |
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(*) Option
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