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GH7500Series Photo Spacer Height Measuring System
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Within the tact time, all of color filter can be measured by high-speed. |
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A photo spacer height measurement system designed for 8th generation large and thin glass substrate. The height and position can be measured at once in high speed, and realized high reappearance stability of the height.
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Features |
- PS height measurement using confocal imaging with white light may not be affected by the color of CF and vibration.
- High speed inspection
50sec./2200mm x 2500mm (16points/glass:4measurement heads)
- PS height and position can be measured at once.
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