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GI4830 Glass Plate Inspection System
Contamination control for 4th generation glass substrate
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An inspection equipment for 4th generation glass substrate.
An original detection optics achieve high sensitivities. This equipment also features accurate front and back surface separate detection, a video monitor for particle review, and a high throughput for substrate.
 

Features
 
  • High throughput
    180sec./730mm x 920mm
  • Applicable to large glass size
    550mm x 650mm - 730mm x 950mm
  • High inspection sensitivity
    phi0.3maicrom particle
    phi3.0maicrom pinhole
  • Front surface / back surface separate detection
  • Possible to particle observation by TV monitor
 
 
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