Suitable contamination control for 8th generation LCD process
The GI7500 is an inspection equipment for 8th generation glass substrate that uses an original detection optics for high inspection sensitivity and high reliability. It's high-speed inspecting and high-magnification particle review by TV monitor make the GI7500 ideal for inspecting the glass.
Features
Glass size
Max. 2200mm x 2500mm
High speed inspection
150sec./2200mm x 2500mm(1m high speed mode)