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GI7500Series Glass Plate Inspection System

Suitable contamination control for 8th generation LCD process
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Picture of GI7100

The GI7500 is an inspection equipment for 8th generation glass substrate that uses an original detection optics for high inspection sensitivity and high reliability. It's high-speed inspecting and high-magnification particle review by TV monitor make the GI7500 ideal for inspecting the glass.

 

Features

 
  • Glass size
    Max. 2200mm x 2500mm
  • High speed inspection
    150sec./2200mm x 2500mm(1maicrom high speed mode)
  • High inspection sensitivity
    phi0.3maicrom : bare glass
  • TV monitor for high-magnification particle review
 
 

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