LC4000 Series Cleaning System for LCD : Hitachi High-Technologies Corporation

This system can achieve multiple processes in single cup style spin cleaning system. New measure for weakness of former spin type cleaning system such as damages on glass substrate and splashing mist at drying and precision cleaning of back surface side are realized.

Features

Possible to decrease contamination and line length of transfer by the chamber can achieve multiple processes in single cup.
Decrease damages on glass substrate by low rotation drying technology.
Prevent re-cling of mist on both sides of glass substrate by upper cup and pressure control.
Collecting and recycling of detergent with double cups.