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LE5565A Exposure System for Large Size Glass Substrate |
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An exposure system for 3rd generation large color filter substrate |
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A proximity exposure for 3rd generation color filter substrate in volume production.
An original mechanisms coupled with technology and a design that maintains cleanliness, and temperature control that increase productivity and quality. |
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Features |
- Pre-alignment
- Proximity gap control
An original non-contact optical gap control is adopted.
- Alignment
A high precision, high speed alignment is achieved by using a linear image sensor.
- Substrate size
Max.650mm x 750mm
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