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NS7000Series Disk Surface Inspection System
Ideal for defect analysis in the surface of substrate and disks.
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A high-precision surface inspection system for substrate and disk featuring a sophisticated defect classification function by laser irradiation of multi dearing and newly developed incline defect method.
 

Features
 
  • Detecting minute defect as high sensitivity by defect method.
  • Inspection on the same spindle using multiple optics.
  • Reflectometer and scatterometer method.
 
 
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