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Plasma Cleaning System

SPC-2000
SPC-2000
 
This machine is automatic plasma cleaning system which cleans the surface of PCB, hybrid substrate, LCD panel and lead frame etc. Improvement of wet character, Adhesion improvement of plastic-sealed and bonding joint strength are enhanced.
 

Features
 
Processing time:15 seconds/board (60 seconds/4boards)
Dual chambers:2 boards simultaneous processing
Board handling:Magazine to magazine handling
Plasma switching of RIE and the PE form is possible (option)
 

Specifications
 
Model SPC-2000
Substrate dimensions Max.250x120mm (Option:Max.250x250mm)
Electrode Parallel planer Standard RIE (Option : RIE⇔PE switch)
RF Power supply 13.56Mhz,Max.600W,RF auto matching
Exhaust system Rotary pump 600 l/minX2
Process gas Mass flow controller Standard Ar (Additional option:H2and O2)
 
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